Computer simulation of spontaneous superlattice formation process by dynamic aurora pulsed laser deposition using phase field method

Abstract

A simulation program for phase separation using the phase-field method was developed to simulate the spinodal decomposition process in the growth of Sr excess SrTiO₃ films using dynamic aurora pulsed laser deposition (PLD). Effects of magnetic field application of dynamic aurora PLD and growth processes were introduced into the phase-field model. Consequently, spontaneous superlattice formation in film growth was reproduced. Furthermore, the validity of this simulation was discussed based on the relation between the superlattice period and the amount of cation impingement, and growth temperature. The simulation results reproduced the experimentally obtained data, showing no superlattice formation when the amount of impinging cations was low. The activation energy for diffusion was obtained from the simulation results as 0.49 eV, which is similar to the 0.25 eV obtained from the experimentally obtained data. Results obtained from simulations are qualitatively appropriate.