Enhanced polarization properties of one-axis-oriented PZT thin films on transparent glass substrates by controlling chemical composition

Abstract

Ferroelectric lead zirconate titanate Pb(Zr,Ti)O₃ (PZT) films were deposited on ITO/glass substrates by chemical solution deposition (CSD) technique with processing temperature below the grass-transition point. (100)_c-oriented PZT films were successfully grown on the ITO/glass substrates with the buffer layer of calcium niobate Ca₂Nb₃O₁₀ nanosheets (ns-CN), together with enhanced crystallinity with increasing PbTiO₃ content in PbZrO₃–PbTiO₃ system, i.e., x in Pb(Zr_1−xTi_x)O₃. Moderate remanent polarization of ∼30 µC cm⁻² and relatively high optical transparency of approximately 80 % were accomplished for the PZT films on ns-CN/ITO/glass with x = 0.80 even at the crystallization temperature of 500 °C, whereas it exhibited only lower piezoelectric constant d₃₃ of 22 pm V⁻¹.