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Cross-sectional structures and conductive properties of ITO–Al2O3 composite thin films prepared by aerosol deposition
Kotaro Ogawa, Kazuki Shinozuka, Yumeng Zheng, Kenji Sakai, Shinzo Yoshikado, Yuuki Sato
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Keywords:
aerosol deposition (AD),
tin-doped indium oxide (ITO),
Al2O3,
composite,
thin film,
room-temperature impact consolidation,
crystallite size
Article ID: 25008
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