Effect of Ce/(Hf+Ce) ratio on ferroelectric and piezoelectric properties and effect of film thickness on ferroelectricity for thick CeO2-HfO2 films deposited by sputtering method without substrate heating

Yu-Ta Chen; Kazuki Okamoto; Nana Sun; Yuxian Hu; Nachi Chaya; Kohei Shimonosono; Miki Nakahata; Hiroyuki Ono; Wakiko Yamaoka; Yukari Inoue; Hiroshi Funakubo

doi:10.2109/jcersj2.25009

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Effect of Ce/(Hf+Ce) ratio on ferroelectric and piezoelectric properties and effect of film thickness on ferroelectricity for thick CeO₂-HfO₂ films deposited by sputtering method without substrate heating

Yu-Ta Chen, Kazuki Okamoto, Nana Sun, Yuxian Hu, Nachi Chaya, Kohei Shimonosono, Miki Nakahata, Hiroyuki Ono, Wakiko Yamaoka, Yukari Inoue, Hiroshi Funakubo

Author information

Yu-Ta Chen
School of Materials and Chemical Technology, Department of Materials Science and Engineering, Institute of Science Tokyo
Kazuki Okamoto
School of Materials and Chemical Technology, Department of Materials Science and Engineering, Institute of Science Tokyo
Nana Sun
School of Materials and Chemical Technology, Department of Materials Science and Engineering, Institute of Science Tokyo
Yuxian Hu
School of Materials and Chemical Technology, Department of Materials Science and Engineering, Institute of Science Tokyo
Nachi Chaya
School of Materials and Chemical Technology, Department of Materials Science and Engineering, Institute of Science Tokyo
Kohei Shimonosono
School of Materials and Chemical Technology, Department of Materials Science and Engineering, Institute of Science Tokyo
Miki Nakahata
School of Materials and Chemical Technology, Department of Materials Science and Engineering, Institute of Science Tokyo
Hiroyuki Ono
Technology and Intellectual Property HQ, TDK Corporation
Wakiko Yamaoka
Technology and Intellectual Property HQ, TDK Corporation
Yukari Inoue
Technology and Intellectual Property HQ, TDK Corporation
Hiroshi Funakubo
School of Materials and Chemical Technology, Department of Materials Science and Engineering, Institute of Science Tokyo