Journal of the Ceramic Society of Japan, Supplement
Online ISSN : 1349-2756
ISSN-L : 1349-2756
Journal of the Ceramic Society of Japan, Supplement 112-1, PacRim5 Special Issue
Session ID : 20-I
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Effect of B, Al, or Ga on the Piezoresistance Properties of 6H-SiC Ceramics Sintered with Carbon
Akira KISHIMOTOYoshimitsu NUMATA
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Abstract
The piezoresistance coefficient was measured on SiC ceramics doped with different amounts of boron, aluminum, or gallium. The piezoresistance coefficient increased with increasing the addition within their solid solution limits. The profile of carrier concentrations, lattice constant and piezoresistance coefficient against doping levels are closely related. Only boron doped sample showed different piezoresistance coefficient and carrier concentration.
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© 2004 The Ceramic Society of Japan
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