Sensing Properties of SiGe-Film-Based Thermoelectric Hydrogen Sensor

Fabin QIU; Woosuck SHIN; Masahiko MATSUMIYA; Kazuki TAJIMA; Noriya IZU; Ichiro MATSUBARA; Norimitsu MURAYAMA

doi:10.14852/jcersjsuppl.112.0.S550.0

Journal of the Ceramic Society of Japan, Supplement 112-1, PacRim5 Special Issue

Session ID : 7

DOI https://doi.org/10.14852/jcersjsuppl.112.0.S550.0

Conference information

Host: The Ceramic Society of Japan

Co-host: Iketani Science and Technology Foundation, International Ceramic Federation, Commemorative Organization for the Japan World Exposition '70, The American Ceramic Society, The Australasian Ceramic Society, The Chinese Ceramic Society, The Korean Ceramic Society, Joint Research Consortium of Synergy Ceramics/Fine Ceramics Research Association, Nanotechnology Researchers Network Center of Japan, The Special Coordination Funds for Promoting Science and Technology, Japan National Tourist Organization, Aichi Prefectural Government, CASIO SCIENCE PROMOTION FOUNDATION, DAIKO FOUNDATION, Nagoya Convention and Visitors Bureau, The Asahi Glass Foundation, The Kao Foundation For Arts And Sciences, The Murata Science Foundation, The Ogasawara Foundation for the Promotion of Science & Engineering, ASAHI GLASS CO., LTD. Research Center, CENTRAL GLASS CO., LTD., ELECTRIC GLASS INDUSTRY ASSOCIATION OF JAPAN (EGAJ), Hattori Company, Ltd., Hitachi Research Laboratory, Hitachi, Ltd., HOYA CORPORATION, INAX Corporation, ITOCHU CERATECH CORP., Japan Cement Association, KYOCERA Corporation, KYUSHU REFRACTORIES CO., LTD., MINO CERAMIC CO., LTD., Murata Manufacturing Co., Ltd., NGK INSULATORS LTD., NGK SPARK PLUG CO., LTD., NICHIAS Corporation, NIKKO COMPANY, Nippon Electric Glass Co., Ltd., Nippon Sheet Glass Co., Ltd., NORITAKE CO., LIMITED, Tokuyama Corporation, TOTO LTD.

Papers

Sensing Properties of SiGe-Film-Based Thermoelectric Hydrogen Sensor

Fabin QIU, Woosuck SHIN, Masahiko MATSUMIYA, Kazuki TAJIMA, Noriya IZU, Ichiro MATSUBARA, Norimitsu MURAYAMA

Author information

Fabin QIU
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
Department of Electronic Science and Technology, School of Electronic Science and Engineering, Jilin University
Woosuck SHIN
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
Masahiko MATSUMIYA
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
Kazuki TAJIMA
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
Noriya IZU
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
Ichiro MATSUBARA
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
Norimitsu MURAYAMA
Synergy Materials Research Center, National Institute of Advanced Industrial Science and Technology (AIST)

Keywords: Thermoelectric effect, Hydrogen sensor, SiGe film, Pt catalyst

CONFERENCE PROCEEDINGS FREE ACCESS

Details

Abstract

Thermoelectric hydrogen sensor was fabricated using RF-sputtered SiGe film and Pt film as thermoelectric layer and catalyst, respectively. The influences from the preparation parameters of SiGe and Pt films and the effect from their relative area ratio were examined for optimizing the hydrogen sensing performance. With increasing the thickness of thermoelectric SiGe film, the noise level was decreased and the sensitivity was increased, but the response rate was almost not affected. A suitable cover ratio of Pt catalyst on the thermoelectric layer of SiGe film was favorable for improving the sensitivity of the sensor and enhancing the response and recovery rates. In addition, compared with the contact mounting method, the suspended sensing element presented a higher sensitivity and a little shorter response time, which could be attributed to the decrease in the thermal mass of the element with the suspending method.

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