Chemical Vapor Deposition of YSZ Films for Thermal Barrier Coating

Abstract

The recent development of fabrication process for thermal barrier coatings (TBCs) has been reviewed. Yttria stabilized zirconia (YSZ) is commonly applied to TBCs for Ni-based super alloys. Although YSZ coatings have been commercially produced by atmospheric plasma spraying (APS) or electron beam physical vapor deposition (EB-PVD), the increase in operation temperatures of gas turbines demands another fabrication process to develop high quality TBCs. Chemical vapor deposition (CVD) can be an alternative route to provide high performance TBCs due to its excellent conformal coverage and controllability of microstructure. This review paper has focused on the fabrication of YSZ films by CVD. A new laser CVD technique enabling high deposition rates competitive to APS and EB-PVD has been also briefly introduced.