Abstract
Electron microprobe has led to a greatly increased knowledge of the relationships between the mechanism of scale formation by high temperature oxidation and sulfidation and its microstructure. But, it is very difficult to analyse acculately constituents of scale with this instrument. This paper reviews guide to find optimum method for oxde- and sulfide scale analysis. Special emphasis is plased on the sample preparation of scale and the operating parameter of electron microprobe for measurement of long wavelength oxygen Kα line.