CORROSION ENGINEERING
Online ISSN : 1884-1155
Print ISSN : 0010-9355
Corrosion of LSI Metallization Materials
Seiichi Iwata
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Keywords: aluminum, metallization, semiconductor device, plastic encapsulation, corrosion test, aluminum manganese alloy, thin film
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1986 Volume 35 Issue 11 Pages 656-661

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