1990 Volume 39 Issue 9 Pages 479-483
The application of SAW (surface acoustic wave) devices which can generate high frequencies for corrosion monitoring in both gaseous and liquid environments was studied. A 36°-roted Y cut X propergation LiTaO3 (36 LT) which can generates SH (shear horizontal displacement)-SAW was selected for piezoelectric substrate. By using this SAW device sensor with a center frequency of 104MHz, metal dissolution process of aluminum thin film in dilute HCl aqueous solution was monitored at room temperature in real time with a high degree of mass sensitivity (2ng/cm2/Hz). Further, the adsorption process of water on evaporated gold surface could be monitored in the atmospheric environment.
