Abstract
Electron diffractive imaging by using selected area nano diffraction in an aberration-corrected transmission electron microscope has been developed. Atomistic structures in silicon <110> and <112> projections have been reconstructed by the method successfully. In the results, the dumbbell structures with the separations of 0.136 nm and 0.078 nm have been resolved clearly. Discrimination of different elements and visibility of light atom columns have been proved by reconstruction of magnesium and oxygen atom columns in a <110> projection of a MgO crystal.
