Fabrication and Characterization of Novel Perovskite-Type Bi-Based Piezoelectric Thin Films

Abstract

Novel perovskite-type Bi-based piezoelectric materials which was discovered by high pressure synthesis were fabricated by MOCVD method. We also suggested a piezoresponse measurement system using synchrotron X-ray for In-situ measurement of “Polarization - Lattice strain - Electric field” at a same time.