Abstract
First, constitution of a simulation program for high-resolution electron microscopy is outlined. In order to record high-resolution images accurately, (S/N) and DQE (detective quantum efficiency) characteristics for new recording materials like the imaging plate are presented. It is shown that digital data of high-resolution microscope images appropriately recorded on the imaging plate can quantitatively be analyzed through image simulation with a residual index. Finally, quantitative high-resolution microscopy with a residual index is briefly discussed by comparing with the X-ray and neutron diffraction analysis with the so-called R-factor.
