Abstract
Analysis methods of electron energy-loss spectroscopy (EELS) based on transmission electron microscopy are described. An introduction includes a short history, types of spectrometers and advantageous points of EELS. Thickness determination and elemental analysis methods are briefly described. Information of electronic structures appearing in valence-loss spectra is explained using spectra of graphite, C60 and diamond. Characteristic effects on core-loss spectra of the selection rule, on site excitation, chemical shift and core-hole interaction are explained.
