TEION KOGAKU (Journal of Cryogenics and Superconductivity Society of Japan)
Online ISSN : 1880-0408
Print ISSN : 0389-2441
ISSN-L : 0389-2441
Originals
Characteristics of a Silicon Pressure Sensor in Superfluid Helium Pressurized up to 1.5 MPa
Minoru MAEDAAkio SATOMichinari YUYAMAMichio KOSUGEFumiaki MATSUMOTOHideo NAGAI
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2003 Volume 38 Issue 3 Pages 129-134

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Abstract
It is known that a piezo-resistive pressure sensor, FPS-51B manufactured by Fujikura Ltd., is available for ‘in situ’ pressure measurement in superfluid helium. The sensor covers a pressure range of zero to 103.4 kPa. The maximum rated pressure is 202.6 kPa at room temperature. The characteristics of the pressure sensor in a pressure range up to approximately 0.2 MPa were reported in detail for use in superfluid helium3,4). We measured the pressure characteristics of this sensor up to 1.5 MPa to determine its availability to be used under much higher pressure. Measurements were taken using a cryostat, which can be pressurized up to 1.5 MPa at room temperature and superfluid helium temperatures. It was proven that the sensor could be used in a superfluid helium environment of up to 1.5 MPa without any damage, and good reproducibility was shown for high pressures of up to 1.5 MPa.
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© 2003 by Cryogenics and Superconductivity Society of Japan (Cryogenic Association of Japan)
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