Fabrication Technologies for Superconducting Quantum Circuits for Large-scale Quantum Computing

Abstract

The superconducting qubit technology based on Josephson junctions is a promising platform for realizing quantum computers. Since being first demonstrated, the coherence time of superconducting qubits has improved from 10 ns to 100 μs over the past 18 years. As a result, high-fidelity qubit operations in a scalable architecture are now becoming possible. In this article, we introduce recent progress in the fabrication process of superconducting qubits for large-scale quantum computation.