Abstract
The concentrations of boron gas in the exhaust gas and in the atmosphere were measured after the removal of particles by a teflon filter with a pore size of 0.2μm . The temperature of the filter was kept at 130°C for the sampling of exhaust gas to prevent sublimation of boron compounds, while it was kept at the atmospheric temperature for the sampling of the atmospheric air. The gas-phase boron compounds was absorbed with the 3% hydrogen peroxide solution in the absorption bottle made by polypropylenes.
The measurement method by the use of ICP-MS has been established by improving many points to avoid contamination, which lowered the quantitation limit to the level of a 0.5μg/m3.