Improvement of Low-Energy PIXE System for Precise Surface Analysis

Wataru KADA; Ippei ISHIKAWA; Atsuya KISHI; Yohei IHARA; Fuminobu SATO; Yushi KATO; Toshiyuki IIDA

doi:10.11190/jer.13.259

Original Article

Improvement of Low-Energy PIXE System for Precise Surface Analysis

Wataru KADA, Ippei ISHIKAWA, Atsuya KISHI, Yohei IHARA, Fuminobu SATO, Yushi KATO, Toshiyuki IIDA

Author information

Wataru KADA
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University
Ippei ISHIKAWA
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University
Atsuya KISHI
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University
Yohei IHARA
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University
Fuminobu SATO
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University
Yushi KATO
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University
Toshiyuki IIDA
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University

Keywords: PIXE, surface analysis, low-energy proton beam, particulate sample

JOURNAL FREE ACCESS

2008 Volume 13 Issue 4 Pages 259-263

DOI https://doi.org/10.11190/jer.13.259

Details

Abstract

A particle induced X-ray emission (PIXE) system was improved for the analysis of the very thin surface of a material. We developed a precise low-energy proton irradiation system with a compact X-ray detector set near a sample. The energy of protons was varied from 30 to 100 keV for the analysis of the thin surface of a sample. It was confirmed from experimental results on some standard samples that the present PIXE analysis system had sufficient statistics on the counting for characteristic X-rays. Also this PIXE system was successfully applied to the analysis of the thin surface of the multi-layer films and the particulate sample.

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