2024 Volume 2 Article ID: 142
In this study, we have fabricated ionic liquid electrospray thrusters to prevent ionic liquid leakage and provide high current density. A double-emitter structure with a needle protruding from the capillary emitter, where the ionic liquid was intended to be held by the needle, was proposed. The fabrication process employs a fabrication technique of a field emitter array, and a newly designed process to reduce the distance between emitters was used to improve emitter density. As a result of the fabrication, the needle was successfully formed in the emitter electrode, and it was found that emitter density could be improved by changing the deposition conditions of multiple SiO2 layers.
