Abstract
In manufacturing technology, it is a dominant tendency in recent years that machine tools for machining, grinding and so on, employ electric operated actuators such as a servo-motor equipped with a ball screw. Some problems of these electric driving systems are, they are excessively large-sized with complex machinery and expensive, as seen in their application to, for example, NC-machine. In order to solve these problems, this study aims to develop a precision driving system actuated by a hydraulic cylinder. The hydraulic driving system consists of a cylinder and four ON/OFF solenoid valves. The valves are the same as those used in a fuel injector of an automobile and thus are capable of high speed switching such as 1.5 ms. It was confirmed in experiments that the developed system had a moving resolution of 1.2 μm and, as a result, was applicable to a precision driving table for micro processing.
