Abstract
Boron-doped diamond sensors have been proposed to measure the concentration of various substances by taking advantage of the characteristics of a wide potential window and a small electric double-layer capacitance current. In addition, we also report the measurement of dissolved ozone concentration. The previous sensor had disadvantages in that the measurement part was large and required management owing to using an Ag/AgCl electrode with a glass body. We have developed a tiny sensor with stable sensitivity by mounting three diamond electrodes on the surface. This diamond sensor has slight individual differences in dissolved ozone concentration, high repeatability, and the capability to measure from low concentrations. We propose that this sensor is suitable for mass production and can easily measure ozone water concentration anywhere.