Abstract
Radio frequency thermal plasmas have been used for material processing and waste treatments. Sophisticated modeling considering chemical reactions has been required for industrial application. Therefore, the thermofluid and concentration fields of oxygen radio frequency thermal plasmas were obtained by solving of 2-D modeling. This formulation was presented using higher-order approximation of the Chapman-Enskog method for the estimation of transport properties. The numerical results indicate that RF oxygen plasmas are more concentrated the center with higher energy efficiency than argon plasmas. The present modeling would give the guidance for the rational design of new material processing using thermal plasmas.
