JOURNAL OF THE ILLUMINATING ENGINEERING INSTITUTE OF JAPAN
Online ISSN : 1349-838X
Print ISSN : 0019-2341
ISSN-L : 0019-2341
Letter
Fabrication of Ultraviolet-light Emission Si/SiO2 Multilayered Films by Using RF Sputtering
Kenta Miura, Yuji Kato, Hitomi Hoshino, Osamu Hanaizumi
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Keywords: Si, SiO2, multilayer, ultraviolet-light emission, sputtering
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2008 Volume 92 Issue 2 Pages 105-108

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© 2008 The Illuminating Engineering Institute of Japan
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