JOURNAL OF THE ILLUMINATING ENGINEERING INSTITUTE OF JAPAN
Online ISSN : 1349-838X
Print ISSN : 0019-2341
ISSN-L : 0019-2341
The optical characteristics of Ta2O5 film coated by LPCVD
Shinji Suzuki, Seishin Shimaoka, Yasutoshi Kojima
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1999 Volume 83 Issue Appendix Pages 39

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