JOURNAL OF THE ILLUMINATING ENGINEERING INSTITUTE OF JAPAN
Online ISSN : 1349-838X
Print ISSN : 0019-2341
ISSN-L : 0019-2341
Application of high density Ar plasma for optical thin films coating
Hiroshi Kamaata, Makoto Sakai, Kazuei Shikama
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2000 Volume 84 Issue Appendix Pages 41

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