[journal title in Japanese]
Online ISSN : 1884-3247
Print ISSN : 0916-7269
Development of High Voltage SOI power IC
Development of 500V trench Isolation SOI process and 1 chip inverter
Tomohiro KawanoKouichi EndouKazuaki OtsukaYasuo Osawa
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JOURNAL FREE ACCESS

1998 Volume 24 Issue 1 Pages 70-78

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Abstract
Using an inverter is a highly effective method of achieving the low power consumption required to reduce the environmental impact of electronic devices. Toshiba has developed a high voltage dielectric isolation IC process that will become a key component of future inverters. The new process realizes 500V blocking with a construction that uses a silicon on insulator (SQI) wafer with 16um silicon layer and 4um buried oxide film. This was accomplished using Toshiba's original silicon wafer direct bonding technology and deep trench isolation technology. This process technology has been used to developed the TPD4005K high voltage pulse width modulation DC brush less motor driver.
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© The Japan Institute of Power Electronics
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