Journal of the Japanese Association for Crystal Growth
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
Relation Between Temperature Gradient and Growth Rate in Silicon Growth
A. NatsumeK. TanahashiN. InoueA. Mori
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2000 Volume 27 Issue 1 Pages 4-

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Abstract
Dependence of temperature gradient in the CZ Si crystal on the growth rate was examined from the reported measurement result and the positive dependence was found. The mechanism is discussed in terms of the heat flow in the crystal and the solid-liquid interface shape.
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© 2000 The Japanese Association for Crystal Growth
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