Journal of the Japanese Association for Crystal Growth
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
25aA03 Reaction at the interface between silica crucible and Si melt : effect of Ba doping(NCCG-34)
X. HuangS. KohH. WatanabeK. SanpeiK. HoshikawaS. Uda
Author information
JOURNAL FREE ACCESS

2004 Volume 31 Issue 3 Pages 105-

Details
Abstract
Reaction at the interface between Ba-doped silica crucible and Si melt for Czochralski Si (CZ-Si) crystal growth has been studied. It is found that appropriate Ba-doping in a silica crucible results in a remarkable effect on suppression of formation of the so-called brownish rings at the interface. This kind of silica crucible is expected to enhance the growth yield in CZ-Si crystal growth.
Content from these authors
© 2004 The Japanese Association for Crystal Growth
Previous article Next article
feedback
Top