Journal of the Japanese Association for Crystal Growth
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
01pB02 Effect of ammonia-ambient annealing on droplet epitaxy of GaN dot structures(NCCG-36)
S. NaritsukaH. OtsuboT. KondoY. YamamotoT. Maruyama
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JOURNAL FREE ACCESS

2006 Volume 33 Issue 4 Pages 209-

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Abstract
The "droplet epitaxy" technique requires neither the induction of surface strain nor any antisurfactants, which means the possibility of the QD formation on any substrates. In this study, we have used NH_3 as the group V source in droplet epitaxy, since it doesn't induce any ion damage during nitridation. The effect of ammonia-ambient post-growth annealing in this technique is investigated.
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© 2006 The Japanese Association for Crystal Growth
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