Basic Concepts for Epitaxial Growth

—Elasticity, Diffusion and Step Dynamics—

Abstract

  Elementary explanations of physical bases of epitaxial growth such as elasticity, surface diffusion are given. The elastic interaction of “defects” and the lattice misfit alter the growth mode of thin films. Step dynamis based on the Burton-Cabrera-Frank type model is discussed briefly. The existence of the diffusion barrier at the step edge, as well as other asymmetries at the step, brings about various morphological instabilities of steps.