2021 Volume 48 Issue 2 Article ID: 48-2-03
Vacuum deposition is expected to be a promising method for fabricating organometal halide perovskite, that has been attracting a lot of attention as next generation solar cells. The vaporization feature of CH3NH3I is a critical issue, which disturbs the deposition rate control for vacuum deposition. We have developed a laser deposition process to overcome the vaporization issue and the precise deposition-rate control was demonstrated. We also succeeded in the epitaxial growth of CH3NH3PbI3. In addition, precise crystallization mechanisms were analyzed using synchrotron radiation facility (SPring-8). In this paper, overview for the vacuum-deposition based perovskite fabrication was presented with our recent research results.