Development of In Situ Measurement Systems for Characterizations of Organic Thin Film Transistor

Abstract

  In situ measurement systems combining with synchrotron X-ray source have been developed for characterizations of organic thin film transistor (OTFT). We show an in situ measurement system for investigating the correlations of morphology on the organic semiconductor layers and charge transport properties during vacuum deposition. The coverage of each monolayer was estimated using the intensity of off-specular diffuse scattering and diffraction. We also show a bias-applied HAXPES measurement system for OTFT that makes it possible to observe the electric potential of the semiconductor and upper insulator in OTFT. The electric potential during OTFT operation was studied using this method.