2018 Volume 32 Issue 2 Pages 231-238
Chemical solvents used for industrial washing process have a negative impact on the environment and the health of their users, and they are high-cost cleaning. In order to reduce the amount of chemical solvent used in the washing process, the non-chemical washing technology with microbubble is expected. We focus on the microbubble generator with a Venturi tube. This generator can generate the bubbles of hundred-micrometer diameter in high void fraction. And it is maintenance-free because of its simple structure. In this paper, authors introduce capability of oil washing with microbubbles generated using a Venturi tube and photoresist removal with Ozone microbubbles, which is friendly for the environment and no harm to the product.
