Structural Analysis of a Micro Hexagonal Mesh Using a Three-way Grating by Hexagonal Digital Moiré Method

Abstract

The hexagonal digital moiré method for analyzing the planar structural information of hexagonally assembled micro/nano structures is presented in detail. The structure of a micro hexagonal mesh fabricated by ultraviolet nanoimprint lithography is characterized. A three-way grating is constructed as a reference grating, whose pitches in three directions are close to those of the 1D arrays of the micro hexagonal mesh. The pitches and the orientations of the three 1D arrays in three directions are simultaneously measured. This method is effective in evaluating the fabrication quality of a hexagonally assembled structure in a large view field.