Calibration Method with Reference Plane for Phase-shifting Digital Holographic Interferometry using Spherical Wave

Abstract

Phase-shifting digital holography is a new method to measure the displacement distribution on the surface of an object. In this paper, to miniaturize the equipment for practical use, we propose a calibration method with reference plane. The reference plane is installed on the piezo stage which is movable in three axes directions with very small amount. Deformation and strain measurement using spherical wave can be realized with this calibration method. The result for the deformation measurement using this method was shown.