Abstract
A novel stress analysis method using a high precise shape measurement method by moiré topography and finite element method is discussed in this paper. The validity of the proposed method is checked using a macro model for static and dynamic deformation. Furthermore, the internal stress caused with a deformation of the micro cantilever can be estimated by the proposed method according to the result of the macro model. The possibility of the expansion of new coverage of an optical measurement technology based on the fringe scanning method can be expected by the possibility of such a new technology shown in this paper.
