Review
Planarization CMP for Semiconductor LSI Devices and Its Applications
—Globalization Activities and Education Activities—
Keywords:
planarization,
CMP (Chemical Mechanical Polishing),
ICPT,
Pac Rim,
planarization technical term dictionary,
A library of CMP planarization technology & applications,
ITRS Road Map
2007 Volume 73 Issue 10 Pages 1097-1101
Details
Article 1st page
