Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
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Roles of an Active Anti-Vibration Apparatus in Precision Positioning
Shinji WAKUI
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Keywords: stepper, scanner, anti-vibration, precision positioning, air-spring, passive, active
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2007 Volume 73 Issue 4 Pages 405-409

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© 2007 The Japan Society for Precision Engineering
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