Abstract
While the light excitation substance such as a high polymer absorbs the light energy of ultraviolet ray, it will be in excitation. If its substance reacts with the processing material in an atomic order under excited conditions, that reaction may be available for a fine processing. Thus, it seems that the processing in a sub-nanometer order may be realized by the phenomenon that is called the luminescence. The following merits can be considered; 1. Little reaction heat. 2. Little heat influence to a processing material. 3. Easy and clean reaction control in comparison with the chemical processing. In this research, the processing principle was deduced and partially verified by dipping a copper for a fixed time in a mixed liquid of the fluorescent substance that glared by ultraviolet ray. The surface of copper that was precisely lapped is used for an experiment. The chemical etching of copper surface was observed by AFM. This paper describes the processing characteristics of copper which ultraviolet ray was exposed on. The irradiation of ultraviolet ray increased the corrosion rate of copper, and the surface roughness becomes small. The irradiation by ultraviolet ray improves the surface roughness over all condenses of processing liquid. The minimum surface roughness was obtained at the appropriate irradiate time, pH, and the height of liquid level. The temperature arise of liquid decreases the surface roughness of copper.
