Development of a High-Speed and High-Accuracy Measurement System for Micro Edge Radius of Long Precision Tool

Abstract

This paper describes a measurement system for the edge radius of a long precision tool. A line-CCD camera is employed to scan the tool edge over the entire tool length. The edge width of the tool at each scanning point is first evaluated from the image of the line-CCD camera. The edge radius is then calculated from the edge width based on the calibration results using pin gauges. A multi-line scanning method is proposed to reduce the defocus errors caused by the out-of-straightness error of the scanning stage. Experimental results have shown that the edge radii over the entire length of a 5100 mm long tool can be evaluated in 30 minutes.