Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Short Article
Application of Turbo Molecular Pump Using 5-Axes Active Magnetic Bearing to Vibration Suppression Unit
Shinji WAKUI†, Yu SASAKI†
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Keywords: active magnetic bearing, turbo molecular pump, vibration suppression, acceleration sensor
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2007 Volume 73 Issue 7 Pages 846-847

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© 2007 The Japan Society for Precision Engineering
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