Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Deep-UV Laser-based Manufacturing Process for Sub-wavelength Structures
—Interference Exposure for Resist Patterning—
Jun AMAKO, Daisuke SAWAKI
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Keywords: deep-UV laser, interference exposure, resist patterning, sub-wavelength structure, master hologram
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2008 Volume 74 Issue 8 Pages 789-794

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© 2008 The Japan Society for Precision Engineering
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