Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Short Article
Structural Vibration Suppression Using Rotating 5-Axes Active Magnetic Bearing
Shinji WAKUI, Konami MONMA, Yu SASAKI
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Keywords: active magnetic bearing, turbo molecular pump, vibration suppression, acceleration sensor
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2008 Volume 74 Issue 8 Pages 891-892

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© 2008 The Japan Society for Precision Engineering
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