Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Process Physics in Thermal Nanoimprint
Yoshihiko HIRAI
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Keywords: nanoimprint, deformation, process, de-molding, adhesion, molecular weight
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2010 Volume 76 Issue 2 Pages 143-147

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