Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Review
Survey of Questionnaire on Ultra-precision Positioning
Takaaki OIWAMasahide KATSUKI
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2011 Volume 77 Issue 10 Pages 912-917

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© 2011 The Japan Society for Precision Engineering
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