Abstract
This paper evaluates the response reproductivity of rolling friction models for precise positioning devices with linear ball guideways. The rolling friction in mechanism behaves different ways between macro and micro displacement regions, and deteriorates the positioning performance. In order to provide the precise positioning performance, the high precision numerical simulator is indispensable to analyze the rolling friction behavior and to design effective compensators. In this research, therefore, three rolling friction models : Koizumi model, Bristle model, and Rheology model, are comparatively evaluated to achieve the precise simulator. The reproductivity of the rolling friction models has been verified through comparative studies in numerical simulations and experiments using a prototype of linear motor-driven table systems with linear ball guideway.