Abstract
This paper presents an extended shadowing compensation model for eliminating shadowing errors in the scanning electron microscope photometric stereo method. This extended model removes the earlier restrictive assumption that the shadowing effects exist only on horizontal surfaces. This model is developed by modeling image intensities in both the absence and presence of shadowing. A numerical solution is proposed to resolve the implicit expressions for double integrals in the model. Compared to the previous shadowing compensation model, the extended model can be more accurate when applied to shadowing regions on surfaces having large inclinations.
