Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Study on 3D-MEMS Optical Switch Module
Joji YAMAGUCHI, Masato MIZUKAMI, Shingo UCHIYAMA, Naru NEMOTO, Yuko KAWAJIRI
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Keywords: MEMS, optical switch, fiber collimator, micro mirror, MEMS control
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2014 Volume 80 Issue 2 Pages 151-155

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© 2014 The Japan Society for Precision Engineering
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