Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Wafer-scale Control of Self-assembling Nanostructures on Silicon for Silicon Photonics
Hiroo OMITakehiko TAWARA
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2014 Volume 80 Issue 5 Pages 448-451

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© 2014 The Japan Society for Precision Engineering
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