Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Review
The Foresight “JSPE Micro/nano Systems Research Technical Committee”, Review of Activities
Mikio HORIE, Fumikazu OOHIRA, Yuichi NAKAZATO, Takahiro ITO, Shinsuke MATSUI, Hisayuki AOYAMA, Hidetsugu TERADA, Takaaki ISHII, Daigo MISAKI, Katsumi HOSOYA
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Keywords: micro/nano systems, micro/nano technology, MEMS/MOEMS, robots, sensors
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2015 Volume 81 Issue 10 Pages 899-903

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